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CNC Video Measuring System

NEXIV series designed for high-speed and accurate measurement of small to large workpieces using optical, laser, and touch probe sensors.

Quick reference chart

This chart helps selection of suitable stroke and magnification according to objects to be measured.

NEXIV VMZ-R Series

NEXIV VMZ-R4540

[New]

A large stroke of 450 x 400 x 200mm allows high-precision, high-speed and easy measuring of various samples.

Ultrahigh-precision Type

NEXIV VMR-H3030

Ultrahigh-precision and general-purpose type appropriate as a master instrument
Max. measurement range: 300 x 300 mm

NEXIV VMR-H3030 Z120X
(with Maximum Magnification Module)

Standard Type

NEXIV VMR-3020

Applicable to a wide range of measurements
Max. measurement range: 300 x 200 mm

NEXIV VMR-3020 Z120X
(with Maximum Magnification Module)

Large Stroke Type

NEXIV VMR-6555

Enables one-time measurement of multiple small parts
Max. measurement range: 650 x 550 mm

NEXIV VMR-6555 Z120X
(with Maximum Magnification Module)

Ultra-large Stroke Type

NEXIV VMR-10080

For high-precision measurements of large substrates and LCD parts
Max. measurement range: 1000 x 800 mm

NEXIV VMR-10080 Z120X
(with Maximum Magnification Module)

Automated Wafer Measuring System

NWL860T
NWT-3000
(for VMR-K3040ZC)

For use with Confocal NEXIV VMZ-K3040
Compatible with 300 mm wafers

Confocal NEXIV

VMZ-K6555

Enables high-precision 2D measurement and fine 3D shape evaluation
Measurement range: 650 x 550 mm

VMZ-K3040

Enables high-precision 2D measurement and fine 3D shape evaluation
Measurement range: 300 x 400 mm

Wafer Carrier Measuring System

NEXIV VMR-C4540

Enables fully automated non-contact measurement

All New Video Measuring System

iNEXIV VMA-2520

Compact and lightweight, an entry level measurement instrument
Max. measurement range: 250 x 200 mm