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  8. NEXIV VMR-3020 with Wafer Loader NWL860T

Automated Wafer Measuring SystemNEXIV VMR-3020 with Wafer Loader NWL860T

With a wafer loading/unloading system, this system measures the whole contents of a wafer carrier automatically.

  • Dedicated software provides fully automatic carrier-by-carrier measurements
  • User-friendly GUI facilitates the selection of wafers to be measured
  • Wafer map facilitates the selection of chips to be measured
  • Industry-proven NWL860T wafer loader ensures reliable wafer transport
  • In combination with the VMR-3020 Z120X, it can measure minuscule dimensions on wafers