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  6. CNC Video Measuring System
  7. Automated Wafer Measuring System
  8. NWT-3000 (for VMR-K3040ZC)

Automated Wafer Measuring SystemNWT-3000 (for VMR-K3040ZC)

  • The system moves wafers between the FOUP and the VMR-C4540 based on the recipe that you will create.
  • Wafers can be put on the stage to measure by an operator.
    (200mm and 150mm wafers can be measured only in case of this.)