Automated Wafer Measuring SystemNWT-3000 (for VMR-K3040ZC)
| VMR-K3040ZC+NWT-3000 | ||
|---|---|---|
| Dimensions | Standard | 3108mm(W) X 1300mm(D) X 2010mm(H) |
| Option | 3108mm(W) X 1600mm(D) X 2275mm(H) | |
| Weight | Standard | 1600kg |
| Option | 1820kg | |
| Compatible Wafer | 300mm SEMI M1.15-0699 Compatible Wafer (Please consult Nikon beforehand if a wafer whose bow is more than 200μm is required.) |
|
| Compatible Carrier | 300mm SEMI E1.0-0699/E47.1-0999/E62-0999 Compatible Wafer FOUP | |
| Load Port | 1 LP is standard. (2 LP is optional.) | |
| Power Supply | Power | 200 VAC ±10% / 50/60Hz / Single Phase |
| Electric Current | 30 A (Maximum Consumption) | |
| Input Terminal | ELB101(Terminal Screw M5)/GB101(Terminal Screw M5) | |
| Vacuum | Vacuum | more than -75 kPa / more than 301/min(ANR) |
| Joint (Piping) | φ1/4inch tube Swage Lock | |
| Safety Standard | CE | EN61010-1 / EN60204-1 / EN55011 Group 1 Class A / EMC_EN61326-1 / EN60825-1 |
| SEMI | SEMI-S2 / -S8 / -F47 | |
| Other | NFPA79 | |