Provides automatic high-precision solutions for measurements of high-precision dimensions and shapes
| Quick reference chart Suitable model according to subjects to measure |
Ultrahigh-precision | |||
|---|---|---|---|---|
| Model | VMR-H3030 | VMR-1515 | VMR-3020 | |
| Measurement accuracy | U2XY | 0.9+3L/1000 µm | 2.5+4L/1000 µm | 2.5+4L/1000 µm |
| Z-axis (with laser AF) | 0.9+L/150 µm | 1.5+L/150 µm | 1.5+L/150 µm | |
| Measurement stroke (X x Y) | 300 x 300 mm | 150 x 150 mm | 300 x 200 mm | |
| Standard model | Master instrument for measurement room Mold |
Package Substrate Pressed part Small part (connector, etc.) Watch component Car metallic part |
Package Substrate Pressed part Connector Molded part |
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| Magnification: 0.5 - 7.5x 1 - 15x 2 - 30x |
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| Min. measurement line width: up to 5 µm | ||||
| TZ model (high magnification) | WL-CSP WP-Bump height WL-SIP Rerouted mask Mask for MEMS |
Small high-density substrate Small high-precision mold Package (2D and height) MEMS part |
High-density substrate Exposure mask for substrate Package (2D and height) MEMS part |
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| Magnification: 1 - 120x |
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| Min. measurement line width: 5 - 1 µm | ||||
| LU model | — | Small LCD Semiconductor wafer (smaller than 150 mm) |
Small LCD Semiconductor wafer (smaller than 150 mm) |
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| Min. measurement line width: up to 5 µm | ||||
| Quick reference chart Suitable model according to subjects to measure |
High-precision | |||
|---|---|---|---|---|
| Model | VMR-6555 | VMR-10080 | VMR-12072 | |
| Measurement accuracy | U2XY | 2.5+2.5L/1000 µm | 3+4L/1000 µm | 3.2+4L/1000 µm |
| Z-axis (with laser AF) | 1.5+L/150 µm | 1.5+L/150 µm | 1.5+L/150 µm | |
| Measurement stroke (X x Y) | 650 x 550 mm | 1000 x 800 mm | 1200 x 720 mm | |
| Standard model | Packages Substrate Print mask for substrate Pressed parts Connectors Molded parts |
Print mask for substrate Mother substrate |
Large flat panel display Related products |
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| Magnification: 0.5 - 7.5x 1 - 15x 2 - 30x |
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| Min. measurement line width: up to 5 µm | ||||
| TZ model (high magnification) | High-density substrate Exposure mask for substrate Packages (2D and height) Drawing machine for substrate |
LCD glass substrate (pattern measurement) Organic EL glass substrate (pattern measurement) |
Large flat-panel display Related products |
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| Magnification: 1 - 120x |
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| Min. measurement line width: 5 - 1 µm | ||||
| LU model | Midsize LCD Color filter |
Large LCD Color filter |
Large LCD Color filter |
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| Min. measurement line width: up to 5 µm | ||||