Standard Type with Maximum Magnification Module NEXIV VMR-3020 Z120X
Its maximum magnification module achieves measurements of fine workpieces. Perfect for measurements of topical MEMS parts, high-density PCBs and semiconductor packages.
Applications
High-density PCBs
Exposure masks for substrates
Packages (2D + height)
MEMS parts
Bonding wires
- Maximum magnification module and high-precision stage enable accurate measurements of large geometry workpieces and minute shapes
- Laser AF with minute laser spots provides accurate measurements of small cross-sectional shapes
- Optional surface analysis software displays 3D shapes of MEMS parts
