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  8. NEXIV VMR-3020 Z120X - Specifications

Standard Type with Maximum Magnification Module NEXIV VMR-3020 Z120X

Specifications

Stroke (XxYxZ)  
  With high magnification lens 300 x 200 x 150 mm (11.8 x 7.9 x 5.9 in.)
  With low magnification lens 250 x 200 x 150 mm (9.8 x 7.9 x 5.9 in.)
Minimum readout 0.1µm
Maximum workpiece weight 20kg (44.0 lb)
Measuring accuracy  
  U1X, U1Y 1.5 + 4L/1000µm (with a workpiece max. 5kg)
  U2XY 2.5 + 4L/1000µm (with a workpiece max. 5kg)
Z-axis (L: Length in mm < W.D.) 1.5 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm
Magnification vs field of view 1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm
Auto focus TTL Laser AF and Vision AF
Illumination Episcopic, diascopic (with high mag. head only), darkfield illumination
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 13A
Dimensions & weight  
  Main unit only 625 x 728 x 1195 mm, approx. 200kg
(24.6 x 28.7 x 47.0 in., 441.0 lb.)
  Main unit & table 690 x 730 x 1725 mm, approx. 240kg
(27.2 x 28.7 x 67.9 in., 529.1 lb.)
  Controller 250 (W) x 550 (D) x 500 (H) mm, approx. 31kg
(9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2100 (W) x 1100 (D) mm (82.7 x 43.3 in.)
Host Computer
Main unit Windows® 7 PC
Monitor 20-in. TFT color
  • *The "Z120X" type is equivalent to the "TZ" type in Japan.