Wafer Carrier Measuring System NEXIV VMR-C4540

Non-contact, fully automatic measurement provides outstanding throughput.
Perfect for measuring FOUP and FOSB.

• Four side planes of the carrier are continuously measured by rotating the kinematic plate in 90° increments
• SEMI-compliant kinematic plate provides perfect XYZ coordinates
• Variety of illumination choices facilitate accurate measurements of registration pin holes and latch-key holes
• Laser AF provides fast, non-contact measurements of wafer positions
• Wide area, high-intensity LED illumination enables accurate measurements of wafer heights
• 300mm, 200mm wafer carrier and SMIF Pod base