Maximum Magnification Module
With variable magnifications up to 120X, these models address applications that demand higher precision and density.
Two objective lenses–wide field and high power (N.A. 0.55)
The combination of these two objective lenses enables a broad array of applications ranging from wide-field observations at low magnifications to accurate measurements at high magnifications.
Newly developed maximum magnification module VMR-Z120X
The new module achieves a wide magnification range from 1X to 120X by changing the optical path of two objective lenses. Used in combination with 8-step zoom, it provides optimum magnifications in all applications from observations in wide fields of view at low magnifications to measurements of minuscule linewidths down to 1µm.
| Optical magnification | 1X | 2X | 4X | 7.5X |
|---|---|---|---|---|
| Total magnification | 36X | 72X | 144X | 270X |
| Field of view (mm) | 4.67X3.5 | 2.33X1.75 | 1.165X0.875 | 0.622X0.467 |
| Optical magnification | 16X | 32X | 64X | 120X |
| Total magnification | 576X | 1146X | 2292X | 4320X |
| Field of view (mm) | 0.291X0.218 | 0.146X0.109 | 0.073X0.055 | 0.039X0.029 |
- *Total magnifications listed above represent those on the monitor screen when a 20" TFT monitor is set to the UXGA (1600 x 1200 pixels) mode.
- *1X–7.5X when the low magnification lens is used, 16X–120X with high magnification lens.
1X
2X
4X
7.5X
16X
32X
64X
120X
High-resolution TTL Laser AF with ultra tiny laser spot
The module comes with a high-resolution TTL Laser AF that incorporates high N.A. objectives and achieves ultra tiny laser spots. It significantly improves performance in focusing on and scanning over thin, transparent/semitransparent (e.g. resists) surfaces or irregular reflection surfaces. High-speed scanning measurement is possible at a rate of 1000 points per second max., enabling ultra-precise Z-axis measurements in a variety of applications.
How TTL Laser AF works
Minute steps measured
Three illumination types
The module delivers the best illumination to any workpieces by providing three types of CNC controllable illuminations–episcopic, diascopic (high magnification head), and darkfield illuminations. This enables edges to be detected with high accuracy.
Low magnifications darkfield illumination
High magnifications darkfield illumination
Episcopic illumination
Darkfield illumination
High-speed, high-precision Vision AF
Thanks to the adoption of a new algorithm and a progressive scan type of camera, Vision AF now provides greater speeds and accuracy closer to those with TTL Laser AF. Vision AF is convenient for applications where TTL Laser AF cannot be used, for example, when focusing on chamfered or round edges.