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  6. White Light Interferometric Microscope System - Traceability

White Light Interferometric Microscope System

Height calibration with the NIST-certified VLSI standard

BW-D501 system


503x503 μm

Repeatability
Unit: nm
1
2
3
4
5
6
7
8
9
10
8.869360
8.878740
8.958649
8.901088
8.878074
8.950821
8.930158
8.893693
8.900814
8.896667
AVE
STD
8.905806
0.030766