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White Light Interferometric Microscope System

Sub-nano-level measurement in a wide range of magnifications

Type: BW-D501 system
Subject: Silicon Carbide (SiC) Wafer


2015x2015μm

Sa 0.483nm
Sq 0.645nm
Sz 7.460nm


ΔH 1.677nm


1007x1007μm

Sa 0.302nm
Sq 0.401nm
Sz 11.187nm


ΔH 1.896nm


503x503μm

Sa 0.144nm
Sq 0.545nm
Sz 121.859nm


ΔH 1.929nm



251x251μm

Sa 0.237nm
Sq 0.374nm
Sz 7.090nm


ΔH 1.948nm


100x100μm

Sa 0.391nm
Sq 0.495nm
Sz 3.934nm


ΔH 1.949nm



50x50μm

Sa 0.306nm
Sq 0.398nm
Sz 3.264nm


ΔH 1.948nm

Precise surface measurements for micrometer-range rough surfaces

Type: BW-A501 system
Subject: Membrane of synthesized diamond using in-liquid plasma chemical vapor deposition
Photos courtesy of: Ph.D. Hiromichi Toyota, Ehime University Graduate School of Science and Engineering


ΔH 4.152μm