White Light Interferometric Microscope System
High Speed Model | ||||||
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BW-D501 | BW-D502 | BW-D503 | BW-D505 | BW-D506 | BW-D507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1 pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 3 nm / 8 μm step height measurement | |||||
Number of pixels | 510 x 510 | |||||
Height measurement time | 4 s / 10 μm scan | |||||
Height measurement range | < 100 μm | < 20 mm | < 100 μm | < 20 mm | ||
Measurement field size | < 2015 x 2015 μm * | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
High Pixel Resolution Model | ||||||
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BW-A501 | BW-A502 | BW-A503 | BW-A505 | BW-A506 | BW-A507 | |
Measurement optical system | Focus Variation with White Light Interferometry (FVWLI) | |||||
Height resolution (algorithm) | 1 pm (0.001 nm) | |||||
Step height measurement reproducibility | σ: 3 nm / 8 μm step height measurement | |||||
Number of pixels | 1398 x 1022 , 698 x 510 (selectable via software) | |||||
Height measurement time | 26 s , 10 s / 10 μm scan | |||||
Height measurement range | < 100 μm | < 20 mm | < 100 μm | < 20 mm | ||
Measurement field size | < 4093 x 2992 μm * | |||||
Piezo actuator | Objective lens driven | Nosepiece driven | ||||
Z axis | Manual | Electric | Manual | Electric | ||
XY axis | Manual | Electric | Manual | Electric | ||
Software | Bridgelements® software modules |
- * The range can be extended by changing the relay lens or by stitching.