Precision Equipment

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LCD Steppers/Scanners—FX Series

FX-101S 10th Generation Super-Large Plate Size Applications

LCD Scanners

FX-101S

Up to 10th generation

FX-86S

Up to 8th generation

FX-76S

Up to 7th generation

FX-67S

Up to 6th generation

FX-66S

Up to 6th generation

Catalogs

All of the products on this page are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regime. They shall not be exported without authorization from the appropriate governmental authorities.