LCD Steppers/Scanners—FX Series

FX-101S 10th Generation Super-Large Plate Size Applications

LCD Scanners

FX-101S: Up to 10th generation

FX-86S: Up to 8th generation

FX-76S: Up to 7th generation

FX-67S: Up to 6th generation

FX-66S: Up to 6th generation

Products archive

Find information on products other than those listed above.

Catalogs

LCD steppers and scanners general catalog (PDF: 658KB)

All of the products on this page are under export restriction. The export of these products is controlled by Japanese Foreign Exchange and Foreign Trade Law and International export control regime. They shall not be exported without authorization from the appropriate governmental authorities.