Products archive (LCD Steppers/Scanners—FX Series)
LCD Scanners
FX-75S/85S
| Resolution (L/S) (switchable) | 3.5 µm (g+h+i-line), 3 µm (i-line) (option) |
|---|---|
| Projection magnification | 1:1 |
| Alignment accuracy | ≦ ±0.6 µm (3σ) |
| Maximum plate size | 1950 × 2250 mm (FX-75S) 2200 × 2500 mm (FX-85S) |
| Tact time | 58 sec./plate (FX-75S) 60 sec./plate (FX-85S) Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-55S/65S
| Resolution (L/S) (switchable) | 3 µm or better (i-line), 3.5 µm or better (g+h+i-line) |
|---|---|
| Projection magnification | 1:1 |
| Alignment accuracy | ≦ ±0.6 µm (3σ) |
| Maximum plate size | 1300 × 1300 mm (FX-55S) 1500 × 1850 mm (FX-65S) |
| Tact time | 59 sec./plate (FX-55S) 67 sec./plate (FX-65S) Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-73S/83S
| FX-73S | FX-83S | |
|---|---|---|
| Resolution (L/S) (switchable) | 3.5 µm (g+h+i-line), 3 µm (i-line) (option) | |
| Projection magnification | 1:1 | |
| Alignment accuracy | 0.6 µm or better | |
| Maximum plate size | 2000 × 2200 mm class | 2200 × 2400 mm class |
| Tact time | 68 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
72 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-71S/81S
| FX-71S | FX-81S | |
|---|---|---|
| Resolution (L/S) (switchable) | 3.5 µm or better (g+h+i-line), 3 µm (i-line) (option) | |
| Projection magnification | 1:1 | |
| Alignment accuracy | 0.6 µm or better | |
| Maximum plate size | 2000 × 2200 mm class | 2200 × 2400 mm class |
| Tact time | 74 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
75 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-53S/63S
| FX-53S | FX-63S | |
|---|---|---|
| Resolution (L/S) (switchable) | 3 µm or better (i-line), 3.5 µm or better (g+h+i-line) | |
| Projection magnification | 1:1 | |
| Alignment accuracy | 0.6 µm or better | |
| Maximum plate size | 1300 × 1300 mm | 1500 × 1850 mm |
| Tact time | 67 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
73 sec./plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
FX-21S/22S
| FX-21S | FX-22S | |
|---|---|---|
| Resolution | 2.4 µm or better (isolated pattern), 3 µm or better (L/S) | |
| Projection magnification | 1:1 | |
| Exposure field | 400 × 700 mm | 400 × 714 mm |
| Alignment accuracy | 0.6 µm or better (3σ) | |
| Maximum plate size | 800 × 950 mm | 920 × 920 mm |
LCD Steppers
FX-903N
| Resolution (L/S) | 1.5 μm |
|---|---|
| Exposure field | 132 × 132 mm |
| Exposure wavelength | i-line (365 nm) |
| Projection magnification | 1:1.25 |
| Alignment accuracy | ≦ ±0.30 μm (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in. (0.25-in. thickness) |
| Tact time (30 shots) | 65 seconds (50 mJ/cm2) |
FX-803M
| Resolution (L/S) | 3.0 μm |
|---|---|
| Exposure field | 132 × 132 mm |
| Exposure wavelength | g+h line |
| Projection magnification | 1:1.25 |
| Alignment accuracy | ≦ ±0.38 μm (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in (0.25-in. thickness) |
| Tact time (30 shots) | 65 seconds (40 mJ/cm2) |
FX-801M
| Resolution | 3 µm or better (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 132 × 132 mm |
| Alignment accuracy | 0.4 µm or better (3σ) |
| Maximum plate size | 730 × 920 mm |
| Reticle size | 6-in. |
| Tact time | 89 sec./plate (42 shots) (30 mJ/cm2) |
FX-702J
| Resolution (1 µm-thick positive-resist) | 1.5 µm or better (L/S), 2.0 µm or better (C/H) |
|---|---|
| Projection magnification | 1:1 |
| Exposure field | 100 mm square ~ 74.83 x 120 mm (ø141.42 mm) |
| Reticle size | 6-in. |
| Maximum plate size | 600 (X) × 720 (Y) mm |
| Alignment accuracy | 0.32 µm or better (8-point + EGA, |M| + 3σ) |
| Options | Pellicle particle detector, extended reticle library, reticle bar code reader, remote control system (RCS) |
FX-701M
| Resolution (1 µm-thick positive-resist) | 2.4 µm (isolated pattern), 3 µm (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 132 mm square ~ 105.87 (H) × 153.75 (V) mm (ø186.68 mm) |
| Reticle size | 6-in. square |
| Maximum plate size | 600 (X) × 720 (Y) mm |
| Alignment accuracy | 0.5 µm (|M| + 3σ, EGA) |
| Options | Pellicle particle detector, extended reticle library, six-reticle multichanger, bar-code reader, plate edge exposure function, etc. |
FX-601F
| Resolution (1 µm-thick positive-resist) | 2.4 µm or better (isolated pattern), 3 µm or better (L/S) |
|---|---|
| Projection magnification | 1:1.25 |
| Exposure field | 120 mm square ~ 98.78 (H) × 138 (V) mm (ø169.71 mm) |
| Reticle size | 6-in. square |
| Maximum plate size | 550 × 650 mm |
| Alignment accuracy | 0.5 µm or better (EGA, |M| + 3σ) |