LCD Scanner FX-101S
The FX-101S offers high throughput, high resolution and high alignment accuracy—major features of the FX series—for super-large plate sizes. Mass production of high-quality and high-grade LCD panels for TVs is possible. The 11th generation super-large plate size can be supported by modified models.
| Resolution (L/S) (switchable) | 3.5 µm (g+h+i), 3.0 µm (i-line) (option) |
|---|---|
| Projection magnification | 1:1 |
| Alignment accuracy | ≦ ±0.6 µm (3σ) |
| Plate size | 10th generation: 2880 x 3130 mm (11th generation plate size can be supported by modified models.) |
| Tact time | 70 sec/plate Conditions: 4 scans, g+h+i-line, 30 mJ/cm2 |
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