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LCD Scanners FX-76S/86S

The FX-76S/86S are for 7th and 8th generation large plate size applications. These LCD scanners support the production of large LCD panels using large plates. With their improved productivity and stable exposure performance, they contribute to volume production of large, high-definition LCD panels.

Resolution (L/S) 3.0 µm (g+h+i-line)
Projection magnification 1:1
Alignment accuracy ≦ ±0.6 µm
Maximum plate size 1950 mm × 2250 mm (FX-76S)
2200 mm × 2500 mm (FX-86S)
Tact time 56 sec/plate (FX-76S)
58 sec/plate (FX-86S)
Conditions: 4 scans, g+h+i-line, 30 mJ/cm2