LCD Scanner FX-66S
The FX-66S is for 5th–6th generation large plate size applications. This exposure equipment supports the production of small to midsize panels using large plates. Its improved productivity and stable exposure performance enable production of small to midsize, high-definition panels with a high resolution of 3 µm or less (L/S).
| Resolution (L/S) | 3.0 µm (g+h+i-line) |
|---|---|
| Projection magnification | 1:1 |
| Alignment accuracy | ≦ ±0.6 µm |
| Maximum plate size | 1500 mm × 1850 mm |
| Tact time | 52 sec/plate Conditions: 1300 mm × 1500 mm, 4 scans, g+h+i-line, 30 mJ/cm2 |
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