FPD/LSI Inspection Microscopes ECLIPSE L300N / L300ND / L200N / L200ND
- Enhanced observational performance
- Enhanced environmental consideration and operation
- Improved functionality between the microscope and digital cameras
Enhanced observation, durability and operational performance, combined with advanced functionality
Improved functionality between the microscope and digital cameras provides ideal imaging
ECLIPSE L300ND
ECLIPSE L200ND
Enhanced observational performance
Epi-fluorescence observation widens inspection range (L300N/L300ND/L200ND only)
- The L300N/L300ND/L200ND is capable of Diascopic illumination and provides various observation methods such as brightfield, darkfield, simple polarizing and DIC. It also employs Epi-fluorescence observation, including 365 nm UV excitation.
- Highly beneficial in inspection of semiconductor resist residues and organic electroluminescence displays
Objective lens: CFI LU Plan Fluor 10x
Brightfield observation of wafer pattern
Darkfield observation
DIC observation
Epi-fluorescence observation of organic substance on wafer
Motorized mercury fiber illuminator Intensilight for Epi-fluorescence observation (L300N/L300ND/L200ND only)
- A motorized mercury precentered fiber illuminator is employed.
- Lamp centering and focus adjustment are not necessary, even after lamp replacement.
- The light source can be placed away from the microscope, reducing heat near the microscope and preventing defocusing.
- Variable light intensity and shutter control provide excellent flexibility.
- The lamp has an average lifespan of 2000 hours.
Four times brighter than conventional Diascopic observation (L300ND only)
- The L300ND employs a new light source and advanced optics to provide four times brighter illumination for Diascopic observation.
CFI60 optics offer long working distance and high NA
Fly-eye lens
- Nikon's original CFI60 optics offer both image brightness through high NA and wider sample range and access with long WD.
- Provides clear, high-contrast brightfield images by minimizing flare.
- The "fly-eye" lens array, which provides uniform illumination throughout the visual field, is employed for darkfield illumination optics, allowing remarkably bright, high-resolution darkfield images.
Enhanced environmental consideration and operation
High-intensity 12V-50W halogen illuminator is brighter than that of a standard 12V-100W illuminator
- Employs the LV-LH50PC precentered lamphouse, which offers greater brightness than that of a 12V-100W illuminator at half the power consumption.
- Incorporating a lamphouse rear mirror and optimizing the size of the lamp filament allows effective and uniform illumination on the pupil plane, critical in an optical system. Objectives with a magnification of 50x or higher benefit from an increased brightness of 20 percent compared to the standard 12V-100W illuminator.
- Features environmentally-friendly design and reduces thermal induced defocus.
The motorized universal nosepiece is three times more durable than conventional models
- Up to six objectives can be mounted.
- Centering mechanism is possible at three nosepiece positions (L300N/L300ND only)
- Improved centricity minimizes image shifting when the objective is changed, even with high magnification. This creates stable observations from high to low magnification.
- An anti-flash mechanism engages when the nosepiece is rotated, to protect the operator's eye.
Antistatic coatings for stronger safeguards against contamination
- Antistatic coatings have been applied to the body, stage, eyepiece tube and other various controls. These coatings strengthen safeguards against contamination and help prevent damage to samples caused by electrostatic charges, thus contributing to higher yields.
Tilting trinocular eyepiece tube for observation at optimum eyepoint level
- Ultra-wide 25-mm field of view and eyepiece angle adjustment between 0 ° and 30 °
- Allows operators to adjust eyepoint level to ensure a comfortable viewing position
Fixed-position X-Y fine movement control
- The X-Y fine movement control is positioned close to the operator.
- All controls are located near each other, allowing stage movements and focusing to be carried out with ease.
Target for easier focusing
- Inserting a focusing target in the optical path allows easy and accurate focusing on low-contrast samples, such as bare wafers.
Controls located at microscope front
- The main control knobs and buttons are located at the front of the microscope for easy access.
- Quick and easy microscope operation while viewing samples is possible.
- Minimizes fatigue during lengthy observations.
Improved functionality between the microscope and digital cameras
Optimized workflow observation, image capture and analysis
- Nikon's simultaneous development of microscopes, digital cameras and imaging software has enabled it to develop a highly functional easy-to-use digital imaging microscopy system.
- All aspects of image flow are supported, including setup for best viewing conditions, digital image capturing, processing and analysis.
NIS-Elements operational panel
(monitor images are simulated.)
