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  8. ECLIPSE L300N / L300ND / L200N / L200ND - Accessories

FPD/LSI Inspection Microscopes ECLIPSE L300N / L300ND / L200N / L200ND

Objectives

Model Magnification NA Working Distance (mm)
CFI L Plan EPI 1x* 0.03 3.8
2.5xA 0.075 8.8
40x 0.65 1.0
CFI LU Plan Fluor EPI 5x 0.15 23.5
10x 0.30 17.5
20x 0.45 4.5
50x 0.80 1.0
100xA 0.90 1.0
CFI LU Plan EPI ELWD 20xA 0.40 13.0
50xA 0.55 10.1
100xA 0.80 3.5
CFI L Plan EPI SLWD 20xA 0.35 24.0
50xA 0.45 17.0
100xA 0.70 6.5
CFI LU Plan Apo EPI 100x 0.95 0.4
150x 0.95 0.3
CFI LU Plan Fluor BD 5x 0.15 18.0
10x 0.30 15.0
20x 0.45 4.5
50x 0.80 1.0
100xA 0.90 1.0
CFI LU Plan BD ELWD 20xA 0.40 13.0
50xA 0.55 9.8
100xA 0.80 3.5
CFI LU Plan Apo BD 100x 0.90 0.51
150x 0.90 0.4
  • *Requires use of polarizer/analyzer.

With correction mechanism CFI L Plan EPI CR series

Model Magnification NA Working Distance
(mm)		 Glass Thickness Correction Range
(mm)
CFI L Plan EPI CR 20x 0.45 10.9-10.0 0-1.2
CFI L Plan EPI CR 50x 0.7 3.9-3.0 0-1.2
CFI L Plan EPI CRA 100x 0.85 1.2-0.85 0-0.7
CFI L Plan EPI CRB 100x 0.85 1.3-0.95 0.6-1.3


Without correction


With correction at 0.7 mm

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Fluorescence filter blocks (L300N/L300ND/L200ND only)

C-FL UV-2A
C-FL V-2A
C-FL BV-2A
C-FL B-2A
C-FL G-2A

  • *Only one cube is attachable.


Brightfield


Epi-fluorescence UV-2A

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DIC components

L2-PO polarizer
L2-RPO rotatable polarizer
L2-AN analyzer
L2-RAN rotary analyzer
L-DIC DIC prism
L-DIHC DIC prism HC (high-contrast)

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Holders


Wafer holder (left: 200 mm, right: 150 mm)


Mask holder
(left: 150 mm, right: 125 mm)
(Maximum 150 mm for Diascopic illumination)