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  5. Lens-Polishing—as used in the production of IC steppers and scanners (3/5)

Lens-Polishing—as used in the production of IC steppers and scanners

The lens-polishing process

  • 1.The polishing plate is heated on a gas stove and resin is placed on the plate to soften.

  • 2.The polishing plate is pushed down onto the polish-forming plate to form the resin into the reverse shape of the lens surface.

  • 3.A blade is used to trim the excess resin off the polishing plate.

  • 4.A knife is used to cut correction grooves into the resin to adjust the amount of friction between the lens and the polishing plate.

  • 5.The lens is secured in place on the polishing machine and a polishing liquid is applied to the surface of the lens using a brush.

  • 6.The polishing plate is placed on the polishing machine and rotated. This commences the polishing.

  • 7.The polishing plate's contact surface is adjusted by cutting correction grooves in accordance with the levels of polishing.

  • 8.The surface of the lens is measured using an interferometer to verify the level of precision. This completes the polishing process. Image shows the surface of the lens: before polishing (above) and after polishing (below).

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