Ultrahigh-precision Type with Maximum Magnification Module NEXIV VMR-H3030 Z120X
| Stroke (XxYxZ) | ||
|---|---|---|
| With high magnification lens | 300 x 300 x 150 mm (11.8 x 11.8 x 5.9 in.) | |
| With low magnification lens | 250 x 300 x 150 mm (9.8 x 11.8 x 5.9 in.) | |
| Minimum readout | 0.01µm | |
| Maximum workpiece weight | 30kg (66.1 lb) | |
| Measuring accuracy | ||
| U1X, U1Y | 0.6 + 2L/1000µm (with a workpiece max. 10kg) | |
| U2XY | 0.9 + 3L/1000µm (with a workpiece max. 10kg) | |
| Z-axis (L: Length in mm < W.D.) | 0.9 + L/150µm | |
| Camera | B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD | |
| Working distance | High mag. objective lens: 9.8mm Low mag. objective lens: 32mm |
|
| Magnification vs field of view | 1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm | |
| Auto focus | TTL Laser AF and Vision AF | |
| Illumination | Episcopic, diascopic (with high mag. head only), darkfield illumination | |
| Power source | AC100-240V±10%, 50/60Hz | |
| Power consumption | Max. 13A | |
| Dimensions & weight | ||
| Main unit only | 915 x 1060 x 1300 mm, approx. 450kg (36.0 x 41.7 x 51.2 in., 992.1 lb.) |
|
| Main unit & table | 1000 x 1100 x 1900 mm, approx. 570kg (39.4 x 43.3 x 74.8 in., 1256.6 lb.) |
|
| Controller | 250 (W) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) |
|
| Footprint | 2400 (W) x 1400 (D) mm (94.5 x 55.1 in.) | |
| Host Computer | ||
| Main unit | Windows® 7 PC | |
| Monitor | 20-in. TFT color | |
- *The "Z120X" type is equivalent to the "TZ" type in Japan.