Ultrahigh-precision Type NEXIV VMR-H3030
Stroke (XxYxZ) | 300 x 300 x 150 mm (11.8 x 11.8 x 5.9 in.) | |
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Minimum readout | 0.01µm | |
Maximum workpiece weight | 30kg (66.1 lb) | |
Measuring accuracy | ||
U1X, U1Y | 0.6 + 2L/1000µm (with a workpiece max. 10kg) | |
U2XY | 0.9 + 3L/1000µm (with a workpiece max. 10kg) | |
Z-axis (L: Length in mm < W.D.) | 0.9 + L/150µm | |
Camera | B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD | |
Working distance | 50mm | |
Magnification vs field of view | ||
Optical Head for Type 1 | 0.5 - 7.5X / 9.33 x 7 - 0.622 x 0.467 mm | |
Optical Head for Type 2 | 1 - 15X / 4.67 x 3.5 - 0.311 x 0.233 mm | |
Optical Head for Type 3 | 2 - 30X / 2.33 x 1.75 - 0.155 x 0.117 mm | |
Auto focus | TTL Laser AF and Vision AF | |
Illumination | Diascopic, episcopic, 8-segment LED ring illumination (inner ring / outer ring) | |
Power source | AC100-240V±10%, 50/60Hz | |
Power consumption | Max. 11A | |
Dimensions & weight | ||
Main unit only | 915 x 1060 x 1300 mm, approx. 450kg (36.0 x 41.7 x 51.2 in., 992.1 lb.) |
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Main unit & table | 1000 x 1100 x 1900 mm, approx. 570kg (39.4 x 43.3 x 74.8 in., 1256.6 lb.) |
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Controller | 250 (W) x 550 (D) x 500 (H) mm, approx. 31kg (9.8 x 21.7 x 19.7 in., 68.3 lb.) |
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Footprint | 2400 (W) x 1400 (D) mm (94.5 x 55.1 in.) | |
Host Computer | ||
Main unit | Windows® 7 PC | |
Monitor | 20-in. TFT color |