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  8. NEXIV VMR-H3030 - Specifications

Ultrahigh-precision Type NEXIV VMR-H3030

Stroke (XxYxZ) 300 x 300 x 150 mm (11.8 x 11.8 x 5.9 in.)
Minimum readout 0.01µm
Maximum workpiece weight 30kg (66.1 lb)
Measuring accuracy  
  U1X, U1Y 0.6 + 2L/1000µm (with a workpiece max. 10kg)
  U2XY 0.9 + 3L/1000µm (with a workpiece max. 10kg)
Z-axis (L: Length in mm < W.D.) 0.9 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance 50mm
Magnification vs field of view  
  Optical Head for Type 1 0.5 - 7.5X / 9.33 x 7 - 0.622 x 0.467 mm
  Optical Head for Type 2 1 - 15X / 4.67 x 3.5 - 0.311 x 0.233 mm
  Optical Head for Type 3 2 - 30X / 2.33 x 1.75 - 0.155 x 0.117 mm
Auto focus TTL Laser AF and Vision AF
Illumination Diascopic, episcopic, 8-segment LED ring illumination (inner ring / outer ring)
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 11A
Dimensions & weight  
  Main unit only 915 x 1060 x 1300 mm, approx. 450kg
(36.0 x 41.7 x 51.2 in., 992.1 lb.)
  Main unit & table 1000 x 1100 x 1900 mm, approx. 570kg
(39.4 x 43.3 x 74.8 in., 1256.6 lb.)
  Controller 250 (W) x 550 (D) x 500 (H) mm, approx. 31kg
(9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2400 (W) x 1400 (D) mm (94.5 x 55.1 in.)
Host Computer
Main unit Windows® 7 PC
Monitor 20-in. TFT color