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  8. NEXIV VMR-6555 Z120X - Specifications

Large Stroke Type with Maximum Magnification Module NEXIV VMR-6555 Z120X

Stroke (XxYxZ)  
  With high magnification lens 650 x 550 x 150 mm (25.6 x 21.7 x 5.9 in.)
  With low magnification lens 600 x 550 x 150 mm (23.6 x 21.7 x 5.9 in.)
Minimum readout 0.1µm
Maximum workpiece weight 30kg (66.1 lb)
Measuring accuracy  
  U1X, U1Y 1.5 + 2.5L/1000µm (with a workpiece max. 30kg)
  U2XY 2.5 + 2.5L/1000µm (with a workpiece max. 30kg)
Z-axis (L: Length in mm < W.D.) 1.5 + L/150µm
Camera B&W 1/3-in. CCD (progressive scan), color 1/3-in. CCD
Working distance High mag. objective lens: 9.8mm
Low mag. objective lens: 32mm
Magnification vs field of view 1 - 120X / 4.67 x 3.5 - 0.039 x 0.029 mm
Auto focus TTL Laser AF and Vision AF
Illumination Episcopic, diascopic (with high mag. head only), darkfield illumination
Power source AC100-240V±10%, 50/60Hz
Power consumption Max. 15A
Dimensions & weight  
  Main unit & table 1220 (W) x 1680 (D) 1750 (H) mm, approx. 600kg
(48.0 x 66.1 x 68.9 in., 1322.8 lb.)
  Controller 250 (D) x 550 (D) x 500 (H) mm, approx. 31kg
(9.8 x 21.7 x 19.7 in., 68.3 lb.)
Footprint 2400 (W) x 2000 (D) mm (94.5 x 78.7 in.)
Host Computer
Main unit Windows® 7 PC
Monitor 20-in. TFT color
  • *The "Z120X" type is equivalent to the "TZ" type in Japan.