| Objective lens |
| Magnification |
3x |
7.5x |
15x |
30x |
| W.D. |
24mm |
5mm |
20mm |
5mm |
| Confocal optics (area height measure) |
| Field of view |
4 x 3mm |
1.6 x 1.2mm |
0.8 x 0.6mm |
0.4 x 0.3mm |
| Height measurement repeatability (2σ) |
0.35µm |
0.25µm |
0.25µm |
0.20µm |
| Height measurement resolution |
0.01µm |
| Brightfield optics (2D measurement) |
| Zooming method |
Motorized 5-step zoom |
| Field of view |
4 x 3mm to 0.27 x 0.2mm |
1.6 x 1.2mm to 0.11 x 0.08mm |
1.26 x 0.95mm to 0.1 x 0.074mm |
0.63 x 0.47mm to 0.05 x 0.04mm |
| Illumination |
White LED diascopic and episcopic illuminator for all types, White LED ring light for type 3x and 7.5x |
| Auto focus |
Vision AF and TTL laser AF (Scan Mode available) |
| Main body |
| Stroke (X, Y, Z) |
300 x 400 x 150mm |
| Guaranteed loading capacity |
20kg |
| Maximum permissible error |
MPEE1X |
1.5 + 2.5L/1000µm |
| MPEE1Y |
2.5 + 2.5L/1000µm |
| Maximum permissible error of Z axis |
MPEE1Z |
1 + L/1000µm |
| Main unit weight |
850kg |
| Power source/power consumption |
AC 100 to 240 V ± 10% 50/60 Hz / 13A to 6.5A |
| Operating condition |
Temperature: 20°C ± 0.5K, Humidity: 70% or less |
| Acquired standard |
CE marking (low voltage/EMC/laser) |
| Footprint |
2500 x 1600mm |
