Synthetic Silica Glass (SiO2)
Nikon's synthetic silica glass (NIFS series) features a homogeneous refractive index, high transmittance and superior laser durability.
The NIFS series has been developed and manufactured based on over 100 years of experience in optics.
NIFS Series Advantages
- Internal transmittance and laser durability
As a result of a reduction in silica glass impurities through the use of high-purity materials and optimizing the synthetic process, the NIFS series offers high transmittance and superior laser durability in the vacuum ultraviolet region.
- Refractive index homogeneity.
The NIFS series' high refractive index homogeneity is the result of strict control of the thermal process.
- Large high-quality material
High-quality material can be up to 2,000 mm square.
Applications
- Optics for ultraviolet and high-power lasers
- Photomask substrates for IC / LCD
- Lens materials and optics for lithography systems
- Lens materials and optics for inspection equipment
- Wafers
- Substrates for various devices (e.g. TFT, CCD, etc.)
- Optics for astronomy
- Optics for medical equipment
- *Please contact us about other applications
Synthetic silica glass substrates for photomasks are also available.
Optical grades
| Grade | Internal transmittance [%] Thickness:10 mm |
Laser durability | Striae | Recommended wavelength |
|---|---|---|---|---|
| NIFS-V | ≧ 99.9 (at 193 nm) | A | 3D Free | ArF excimer laser (193 nm) |
| NIFS-A | ≧ 99.9 (at 193 nm) | B | 3D Free 1D Free |
ArF excimer laser (193 nm) |
| NIFS-U | ≧ 99.9 (at 248 nm) | C | 3D Free 1D Free |
KrF excimer laser (248 nm) |
| NIFS-S | ≧ 99.9 (at 365 nm) | — | 3D Free 1D Free |
UV region, Visible region |
| NIFS-I | — | — | (non-optical use) |
- *Laser durability is classified into three groups, A, B and C. NIFS-V represents the highest grade.
The optical properties of NIFS-I cannot be guaranteed.
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Please see our brochure for more details
Synthetic Silica Glass (PDF:858KB)