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Precision Equipment Company

We contribute to the information society using our manufacturing strength backed by our advanced optics and precision technologies. Toshio Matsuura Executive Assistant to General Manager of LCD Equipment Division, Precision Equipment Company, Nikon Corporation

Supporting the information society with our manufacturing strength

Electronic devices have brought us closer to the information society. There are two key components leading to this major advance: Semiconductors (ICs) and LCD panels.
The Precision Equipment Company develops and manufactures the equipment essential for the manufacture of ICs and LCD panels. In February 2012, the development of multi-lens array type exposure equipment by our LCD Equipment Division won the Prime Minister's Award in the Manufacturing and Production Process Category as part of the Fourth Monodzukuri Nippon Grand Award.
The Monodzukuri Nippon Grand Award, established in August 2005, is an award presented by the Prime Minister. The award aims to develop and pass on the "monodzukuri (the art of making goods) " that has supported the growth of Japan's industry and culture and has contributed significantly to the enrichment of our lives.

Exposure equipment supporting our information society

Exposure equipment, including IC scanner NSR-S621D and LCD scanner FX-101S, are used to manufacture ICs and LCD panels, and contribute to the development of various data terminals, electronic devices, etc.


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Development of exposure equipment that integrates advanced technologies


The awards ceremony at the Prime Minister's official residence

The multi-lens array method is a technology developed for a projection optical system in LCD scanners that expose circuit patterns for LCD panels onto a glass plate.
We developed a self-calibration system that finely adjusts the multi-lens array. This enables the patterns exposed by each of the lenses to be stitched smoothly.
Since conventional equipment has a small exposure field, it was difficult to mass-produce large-size panels.
However, this method enables exposure of a large area with a single scan, thereby accommodating ever-increasing glass plate sizes as well as realizing efficient production of high-grade, large-size panels.
For the first time ever, this method became a practical reality, not only because of the projection lenses but also thanks to the technologies that resolved various challenges associated with the increasing size of glass plates, such as control of large stages weighing several tons with submicron accuracy and dealing with post exposure pattern distortions.
In addition to Nikon's unsurpassed optics technology and ultra-precise control technology, this award acknowledges the fact that the efficient mass-production of large-size LCD panels using the exposure equipment equipped with this method has promoted the rapid spread of large-size TVs, laptop PCs and LCD monitors and has contributed to the enhancement of our lives and advancement of the information society. The Precision Equipment Company will continue to pursue the development of various technologies that contribute to the information society.


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