Precision Equipment Business

The first Nikon IC stepper was released in 1980. IC steppers and scanners are finely tuned machines that miniaturize circuit patterns and print them on wafers. Regarded as the most precise machines ever developed, they require ultra-high-resolution projection lenses, exceptionally exact driving mechanisms, and elaborate control technology. Because circuit pattern miniaturization is vital for enhanced performance and increased integration of ICs, we are continuously developing groundbreaking technologies. These include immersion lithography, which enables ultra-high NAs (numerical aperture) by intensifying the projection lens’ resolving power to the maximum level and filling the space between the lens and the wafer with purified water. We also created a streamlined platform that simultaneously delivers excellent overlay accuracy and ultra-high productivity.

Nikon also supplies LCD steppers and scanners for mid-sized and smaller high-definition panels, as well as organic electroluminescent panels for smartphones and tablet computers. For the production of large LCD panels, we employ the unique multi-lens projection optical systems.

• Products & Support — Precision Equipment