Entering a new era of technology using light and water
Whether it comes from the sun or a simple reading lamp, light is vital to our lives.
People have been studying light since the days of the ancient Greeks when Aristotle explored the many colors of light and the formation of rainbows.
Later— Descartes, Newton, and Einstein as well as other great philosophers and scientists followed in this quest to understand the nature of light.
Thanks to their curiosity and determination, light is now used in countless appliances that enhance the comfort and convenience of our daily lives.
ICs (integrated circuits) found in sophisticated compact devices such as digital cameras, laptops, and cell phones rely on complex technologies that make use of light.
The main objective in IC manufacturing is to produce as many infinitesimally fine and precise lines as possible on tiny chips. Our IC steppers and scanners use the most advanced light-based technologies to achieve this critical goal.
Since their invention, ICs have rapidly improved and they now integrate a multitude of functions to increase the comfort and convenience in our lives.
However, when we attempted to further miniaturize the ICs in order to develop the next generation of devices, we reached the theoretical resolution limit. This made it impossible to produce finer lines using existing technologies.
Nikon overcame this challenge by adding purified water to IC manufacturing, and we were able to create even smaller features using Immersion Lithography Technology. This technique uses purified water, which has a refractive index greater than air, as a lens. Continued improvements to ICs will not only create a more advanced and comfortable digital society, it will also help us develop a more ecologically sustainable society by reducing power consumption and heat emissions.
In addition to employing ancient learning, Nikon lithography technology continues to evolve to enable next generation semiconductor manufacturing. Although it may not be immediately obvious, Nikon technology is an essential part of our daily lives.
